Modeling and compensation of backreflection signal in diffuse reflection optical MEMS spectrometers

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Authors: Samir Abozyd, Mazen Erfan, Bassem Mortada, Yasser M. Sabry

Journal title: MOEMS and Miniaturized Systems XXIV

Journal publisher: SPIE

Published year: 2025

DOI identifier: 10.1117/12.3043246