Automated and Optimized Lot-To-Order Matching in 300 mm Semiconductor Facilities

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Authors: Christian Flechsig, Jacob Lohmer, Rainer Lasch, Benjamin Zettler, Germar Scheider, Dietrich Eberts

Journal title: 2021 32nd Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC)

Journal publisher: IEEE

Published year: 2021

Published pages: 1-6

DOI identifier: 10.1109/ASMC51741.2021.9435730

ISBN:978-1-7281-8645-0