A python-based approach to sputter deposition simulations in combinatorial materials science

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Authors: F. Thelen, R. Zehl, J.L. Bürgel, D. Depla, A. Ludwig

Journal title: Surface and Coatings Technology

Journal number: 503

Journal publisher: Elsevier BV

Published year: 2025

DOI identifier: 10.1016/J.SURFCOAT.2025.131998

ISSN: 0257-8972