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Authors: Panagiotis Dimitrakellis, Evangelos Gogolides, Angelos Zeniou, Kamil Awsiuk, Jakub Rysz, Mateusz M. Marzec
Journal title: Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
Journal number: 35/4
Journal publisher: American Institute of Physics
Published year: 2017
Published pages: 041303
DOI identifier: 10.1116/1.4984613
ISSN: 0734-2101