Wafer-scale HfO 2 encapsulated silicon nanowire field effect transistor for efficient label-free DNA hybridization detection in dry environment

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Authors: Ganesh Jayakumar, Maxime Legallais, Per-Erik Hellström, Mireille Mouis, Isabelle Pignot-Paintrand, Valérie Stambouli, Céline Ternon, Mikael Östling

Journal title: Nanotechnology

Journal number: 30/18

Journal publisher: Institute of Physics Publishing

Published year: 2019

Published pages: 184002

DOI identifier: 10.1088/1361-6528/aaffa5

ISSN: 0957-4484