Monolithic Wafer Scale Integration of Silicon Nanoribbon Sensors with CMOS for Lab-on-Chip Application

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Authors: Ganesh Jayakumar, Per-Erik Hellström, Mikael Östling

Journal title: Micromachines

Journal number: 9/11

Journal publisher: Multidisciplinary Digital Publishing Institute (MDPI)

Published year: 2018

Published pages: 544

DOI identifier: 10.3390/mi9110544

ISSN: 2072-666X