An innovative large scale integration of silicon nanowire-based field effect transistors

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Authors: M. Legallais, T.T.T. Nguyen, M. Mouis, B. Salem, E. Robin, P. Chenevier, C. Ternon

Journal title: Solid-State Electronics

Journal number: 143

Journal publisher: Pergamon Press Ltd.

Published year: 2018

Published pages: 97-102

DOI identifier: 10.1016/j.sse.2017.11.008

ISSN: 0038-1101