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Authors: M. Legallais, T. T. T. Nguyen, M. Mouis, B. Salem, C. Ternon
Journal title: 2017 Joint International EUROSOI Workshop and International Conference on Ultimate Integration on Silicon (EUROSOI-ULIS)
Journal publisher: IEEE
Published year: 2017
Published pages: 231-234
DOI identifier: 10.1109/ULIS.2017.7962570
ISBN: 978-1-5090-5313-1