Planar Fabrication Process Development for Mm-Wave Resonant Tunneling Diode (RTD) Using BCB Etch-Back

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Authors: Wang, J., Alharbi, K., Khalid, A., and Wasige, E.

Journal title: 27th International Conference on Indium Phosphide and Related Materials

Journal number: Santa Barbara, CA, USA, 28 June - 2 July 2015,

Journal publisher: University of Glasgow

Published year: 2015