Foundry Developments Toward Silicon Nitride Photonics From Visible to the Mid-Infrared,

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Authors: Pascual Muñoz, Paulus W. L. van Dijk, Douwe Geuzebroek, Michael Geiselmann, Carlos Domínguez, Andim Stassen, José David Doménech, Michael Zervas, Arne Leinse, Chris G. H. Roeloffzen, Bernardo Gargallo, Rocío Baños, Juan Fernández, Gloria Micó Cabanes, Luis Alberto Bru, Daniel Pastor

Journal title: IEEE Journal of Selected Topics in Quantum Electronics

Journal publisher: Institute of Electrical and Electronics Engineers

Published year: 2019

DOI identifier: 10.1109/jstqe.2019.2902903

ISSN: 1077-260X