Scatterometry and diffractometry techniques to monitor surfaces textured by rapid ultra-short pulse laser

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Authors: C Alleaume, S Alamri, T Kunze, J Ziegler, A Wilson, R Bola

Journal title: Journal of Physics: Photonics

Journal number: 2/3

Journal publisher: IOP Publishing Ltd.

Published year: 2020

Published pages: 031004

DOI identifier: 10.1088/2515-7647/ab92b0

ISSN: 2515-7647