SiGe-enhanced Si capacitive modulator integration in a 300 mm silicon photonics platform for low power consumption

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Authors: Maurin Douix, Diego Perez-Galacho, Ismael Charlet, Charles Baudot, Pablo Acosta-Alba, Sébastien Kerdilès, Catherine Euvrard, Philippe Grosse, Jonathan Planchot, Romuald Blanc, Rémi Beneyton, Olivier Gourhant, Sébastien Crémer, Aurélie Souhaité, Nathalie Vulliet, Laurent Vivien, Delphine Marris-Morini, Frédéric Boeuf

Journal title: Optics Express

Journal number: 27/13

Journal publisher: Optical Society of America

Published year: 2019

Published pages: 17701

DOI identifier: 10.1364/oe.27.017701

ISSN: 1094-4087