Low loss poly-silicon for high performance capacitive silicon modulators

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Authors: Maurin Douix, Charles Baudot, Delphine Marris-Morini, Alexia Valéry, Daivid Fowler, Pablo Acosta-Alba, Sébastien Kerdilès, Catherine Euvrard, Romuald Blanc, Rémi Beneyton, Aurélie Souhaité, Sébastien Crémer, Nathalie Vulliet, Laurent Vivien, Frédéric Boeuf

Journal title: Optics Express

Journal number: 26/5

Journal publisher: Optical Society of America

Published year: 2018

Published pages: 5983

DOI identifier: 10.1364/oe.26.005983

ISSN: 1094-4087