Ultrahigh-Q photonic crystal cavities in silicon rich nitride

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Authors: Kapil Debnath, Marco Clementi, Thalía Domínguez Bucio, Ali Z. Khokhar, Moïse Sotto, Katarzyna M. Grabska, Daniele Bajoni, Matteo Galli, Shinichi Saito, Fredric Y. Gardes

Journal title: Optics Express

Journal number: 25/22

Journal publisher: Optical Society of America

Published year: 2017

Published pages: 27334

DOI identifier: 10.1364/oe.25.027334

ISSN: 1094-4087