Optimization of Deep Rib High Speed Phase Modulators on 300mm Industrial Si-Photonics Platform

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Authors: Stephane Monfray, Sébastien CREMER, Nathalie VULLIET, STMicroelectronics S.A. (France); Emmanuel Dubois, Institut d'Electronique de Microélectronique et de Nanotechnologie (France); Florian Domengie, Sebastien Jan, Francoise Baille, Frederic Boeuf, STMicroelectronics S.A. (France)

Journal title: Photonics Europe Conference, 2020

Journal publisher: SPIE - The International Society for Optics and Photonics

Published year: 2020