Variable index silicon nitride for CMOS photonics applications

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Authors: F. Y. Gardes, T. Domınguez Bucio, G. de Paoli, S. T. Ilie, I. Skandalos, C. Lacava, M. Milosevic, S.L Jantzen, A. Z. Khokhar, P. Petropoulos

Journal publisher: SPIE Photonics West

Published year: 2019