Low-Temperature NH3-Free Silicon Nitride Platforms for Integrated Photonics

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Authors: T. Dominguez Bucio, S. L. Scholl, S. T. Ilie, C. Lacava, K. Debnath, A. Z. Khokhar, M. Banakar, M. Sotto, K. M. Grabska, M. Clementi, D. Bajoni, M. Galli, S. Saito, P. Petropoulos, F. Y. Gardes

Journal title: 2018 IEEE 15th International Conference on Group IV Photonics (GFP)

Journal publisher: IEEE

Published year: 2018

Published pages: 1-2

DOI identifier: 10.1109/group4.2018.8478748

ISBN: 978-1-5386-5361-6