High-directionality L-shaped fiber-chip grating couplers realized in 300-mm silicon-on-insulator platform with deep-ultraviolet lithography (Conference Presentation)

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Authors: Carlos A. Alonso-Ramos, Daniel Benedikovich, Diego Pérez-Galacho, Sylvain Guerber, Vladyslav Vakarin, Guillaume Marcaud, Xavier Le Roux, Eric Cassan, Delphine Marris-Morini, Pavel Cheben, Frédéric Boeuf, Charles Baudot, Laurent Vivien

Journal title: Integrated Optics: Devices, Materials, and Technologies XXII

Journal publisher: SPIE

Published year: 2018

Published pages: 29

DOI identifier: 10.1117/12.2290584

ISBN: 9781-510615564