Low loss grating coupled optical interfaces for large volume fabrication with deep ultraviolet optical lithography

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Authors: Carlos Alonso-Ramos, Sylvain Guerber, Diego Pérez-Galacho, Vladyslav Vakarin, Xavier Le Roux, Guillaume Marcaud, Eric Cassan, Delphine Marris-Morini, Pavel Cheben, Frédéric Boeuf, Charles Baudot, Laurent Vivien, Daniel Benedikovic

Journal title: Silicon Photonics: From Fundamental Research to Manufacturing

Journal publisher: SPIE

Published year: 2018

Published pages: 28

DOI identifier: 10.1117/12.2306258

ISBN: 9781-510618992