Developments in 300mm silicon photonics using traditional CMOS fabrication methods and materials

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Authors: C. Baudot, M. Douix, S. Guerber, S. Cremer, N. Vulliet, J. Planchot, R. Blanc, L. Babaud, C. Alonso-Ramos, D. Benedikovich, D. Perez-Galacho, S. Messaoudene, S. Kerdiles, P. Acosta-Alba, C. Euvrard-Colnat, E. Cassan, D. Marris-Morini, L. Vivien, F. Boeuf

Journal title: 2017 IEEE International Electron Devices Meeting (IEDM)

Journal publisher: IEEE

Published year: 2017

Published pages: 34.3.1-34.3.4

DOI identifier: 10.1109/iedm.2017.8268495

ISBN: 978-1-5386-3559-9