Towards electro-optical integration of hybrid III-V on Si lasers into the BEOL of a CMOS technology

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Authors: H. Hahn, M. Seifried, G. Villares, Y. Baumgartner, M. Halter, C. Caer, D. Caimi, M. Sousa, R. Dangel, N. Meier, F. Horst, L. Czornomaz, B. J. Offrein

Journal title: 2017 75th Annual Device Research Conference (DRC)

Journal publisher: IEEE

Published year: 2017

Published pages: 1-2

DOI identifier: 10.1109/DRC.2017.7999518

ISBN: 978-1-5090-6328-4