Low-resistive, CMOS-compatible ohmic contact schemes to moderately doped n-InP

Summary

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Authors: Herwig Hahn, Marilyne Sousa, Lukas Czornomaz

Journal title: Journal of Physics D: Applied Physics

Journal number: 50/23

Journal publisher: Institute of Physics Publishing

Published year: 2017

Published pages: 235102

DOI identifier: 10.1088/1361-6463/aa6f7a

ISSN: 0022-3727