Multichannel 65 zF rms Resolution CMOS Monolithic Capacitive Sensor for Counting Single Micrometer-Sized Airborne Particles on Chip

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Authors: Pietro Ciccarella, Marco Carminati, Marco Sampietro, Giorgio Ferrari

Journal title: IEEE Journal of Solid-State Circuits

Journal number: 51/11

Journal publisher: Institute of Electrical and Electronics Engineers

Published year: 2016

Published pages: 2545-2553

DOI identifier: 10.1109/JSSC.2016.2607338

ISSN: 0018-9200