Vapour-assisted roll-to-roll nanoimprinting of micropillars on nanocellulose films

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Authors: Tapio Mäkelä, Ari Hokkanen, Asko Sneck, Teemu Ruotsalainen, Alexey Khakalo, Tekla Tammelin

Journal title: Microelectronic Engineering

Journal number: 225

Journal publisher: Elsevier BV

Published year: 2020

Published pages: 111258

DOI identifier: 10.1016/j.mee.2020.111258

ISSN: 0167-9317