On the description of metal ion return in reactive high power impulse magnetron sputtering

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Authors: T. Kubart; D.F. Fernandes; T. Nyberg

Journal title: Crossref

Journal number: 2

Journal publisher: Elsevier BV

Published year: 2021

DOI identifier: 10.1016/j.surfcoat.2021.127234

ISSN: 0257-8972