Challenges and Progress on Carbon Nanotube Integration for BEOL Interconnects

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Authors: B. Uhlig, A. Dhavamani, N. Nagy, K. Lilienthal, R. Liske, R. Ramos, J. Dijon, H. Okuno, D. Kalita, J. Lee, V. Georgiev, A. Asenov, S. Amoroso, L. Wang, F. Koenemann, B. Gotsmann, G. Goncalves, B. Chen, J. Liang, R. R. Pandey, R. Chen, A. Todri-Sanial

Journal title: 2018 IEEE International Interconnect Technology Conference (IITC)

Journal publisher: IEEE

Published year: 2018

Published pages: 16-18

DOI identifier: 10.1109/IITC.2018.8430411

ISBN: 978-1-5386-4337-2