Summary
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Authors: Jaehyun Lee, Jie Liang, Salvatore M. Amoroso, Toufik Sadi, Liping Wang, Flamen Asenov, Andrew Pender, Dave T. Reid, Vihar P. Georgiev, Campbell Millar, Aida Todri-Sanial, Asen Asenov
Journal title: 2017 International Conference on Simulation of Semiconductor Processes and Devices (SISPAD)
Journal publisher: IEEE
Published year: 2017
Published pages: 153-156
DOI identifier: 10.23919/SISPAD.2017.8085287
ISBN: 978-4-86348-610-2