Alignment-tolerant interfacing of a photonic integrated circuit using back side etched silicon microlenses

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Authors: Jeroen Missinne, Nuria Teigell Benéitez, Nivesh Mangal, Jing Zhang, Anton Vasiliev, Joris Van Campenhout, Bradley Snyder, Gunther Roelkens, Geert Van Steenberge

Journal title: Silicon Photonics XIV

Journal publisher: SPIE

Published year: 2019

Published pages: 3

DOI identifier: 10.1117/12.2506159

ISBN: 9781-510624894