Room temperature sputtering of inclined c-axis ZnO for shear mode solidly mounted resonators

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Authors: G. Rughoobur, M. DeMiguel-Ramos, T. Mirea, M. Clement, J. Olivares, B. Díaz-Durán, J. Sangrador, I. Miele, W. I. Milne, E. Iborra, A. J. Flewitt

Journal title: Applied Physics Letters

Journal number: 108/3

Journal publisher: American Institute of Physics

Published year: 2016

Published pages: 034103

DOI identifier: 10.1063/1.4940683

ISSN: 0003-6951