1300°C Annealing of 1×10²⁰ Al⁺ Ion Implanted 3C-SiC

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Authors: Roberta Nipoti, Maria Concetta Canino, Filippo Bonafè, Frank Torregrosa, Sylvain Monnoye, Hugues Mank, Marcin Zielinski

Journal title: Materials Science Forum

Journal number: 963

Journal publisher: Scientific.net

Published year: 2019

Published pages: 420-423

DOI identifier: 10.4028/www.scientific.net/msf.963.420

ISSN: 1662-9752