Effect of Nitrogen and Aluminum Doping on 3C-SiC Heteroepitaxial Layers Grown on 4° Off-Axis Si (100)

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Authors: Cristiano Calabretta, Viviana Scuderi, Ruggero Anzalone, Marco Mauceri, Danilo Crippa, Annalisa Cannizzaro, Simona Boninelli, Francesco La Via

Journal title: Materials

Journal number: 14/16

Journal publisher: MDPI Open Access Publishing

Published year: 2021

Published pages: 4400

DOI identifier: 10.3390/ma14164400

ISSN: 1996-1944