Protrusions reduction in 3C-SiC thin film on Si

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Authors: Massimo Zimbone, Marco Mauceri, Grazia Litrico, Eric Gasparo Barbagiovanni, Corrado Bongiorno, Francesco La Via

Journal title: Journal of Crystal Growth

Journal number: 498

Journal publisher: Elsevier BV

Published year: 2018

Published pages: 248-257

DOI identifier: 10.1016/j.jcrysgro.2018.06.003

ISSN: 0022-0248