Characterization of protrusions and stacking faults in 3C-SiC grown by sublimation epitaxy using 3C-SiC-on-Si seeding layers

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Authors: Michael Schoeler, Philipp Schuh, Grazia Litrico, Francesco La Via, Marco Mauceri, Peter J. Wellmann

Journal title: Advanced Materials Proceedings

Journal number: 2/12

Journal publisher: VBRI Press

Published year: 2017

Published pages: 774-778

DOI identifier: 10.5185/amp.2017/419

ISSN: 2002-4428