Temperature Investigation on 3C-SiC Homo-Epitaxy on Four-Inch Wafers

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Authors: Anzalone, Zimbone, Calabretta, Mauceri, Alberti, Reitano, La Via

Journal title: Materials

Journal number: 12/20

Journal publisher: MDPI Open Access Publishing

Published year: 2019

Published pages: 3293

DOI identifier: 10.3390/ma12203293

ISSN: 1996-1944