Stacking Faults Defects on 3C-SiC Homo-Epitaxial Films

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Authors: Grazia Litrico, Ruggero Anzalone, Alessandra Alberti, Corrado Bongiorno, Giuseppe Nicotra, Massimo Zimbone, Marco Mauceri, Salvatore Coffa, Francesco La Via

Journal title: Materials Science Forum

Journal number: 924

Journal publisher: Trans Tech Publications Ltd

Published year: 2018

Published pages: 124-127

DOI identifier: 10.4028/www.scientific.net/msf.924.124

ISSN: 1662-9752