1300°C Annealing of 1 × 10 20  cm −3 Al + Ion Implanted 3C-SiC/Si

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Authors: Roberta Nipoti, Mariaconcetta Canino, Marcin Zielinski, Frank Torregrosa, Alberto Carnera

Journal title: ECS Journal of Solid State Science and Technology

Journal number: 8/9

Journal publisher: Electrochemical Society, Inc.

Published year: 2019

Published pages: P480-P487

DOI identifier: 10.1149/2.0121909jss

ISSN: 2162-8769