Growth of Large-Area, Stress-Free, and Bulk-Like 3C-SiC (100) Using 3C-SiC-on-Si in Vapor Phase Growth

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Authors: Schuh, la Via, Mauceri, Zielinski, Wellmann

Journal title: Materials

Journal number: 12/13

Journal publisher: MDPI Open Access Publishing

Published year: 2019

Published pages: 2179

DOI identifier: 10.3390/ma12132179

ISSN: 1996-1944