Ohmic contacts on n-type and p-type cubic silicon carbide (3C-SiC) grown on silicon

Summary

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Authors: M. Spera, G. Greco, R. Lo Nigro, C. Bongiorno, F. Giannazzo, M. Zielinski, F. La Via, F. Roccaforte

Journal title: Materials Science in Semiconductor Processing

Journal number: 93

Journal publisher: Pergamon Press

Published year: 2019

Published pages: 295-298

DOI identifier: 10.1016/j.mssp.2019.01.015

ISSN: 1369-8001