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Authors: M. Spera, G. Greco, R. Lo Nigro, C. Bongiorno, F. Giannazzo, M. Zielinski, F. La Via, F. Roccaforte
Journal title: Materials Science in Semiconductor Processing
Journal number: 93
Journal publisher: Pergamon Press
Published year: 2019
Published pages: 295-298
DOI identifier: 10.1016/j.mssp.2019.01.015
ISSN: 1369-8001