Defect and density evolution under high-fluence ion irradiation of Si / SiO 2 heterostructures

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Authors: F. Djurabekova, C. Fridlund, K. Nordlund

Journal title: Physical Review Materials

Journal number: 4/1

Journal publisher: American Physical Society

Published year: 2020

Published pages: 013601-1 to 013601-12

DOI identifier: 10.1103/physrevmaterials.4.013601

ISSN: 2475-9953