An atomic force microscope integrated with a helium ion microscope for correlative nanoscale characterization

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Authors: Santiago H Andany, Gregor Hlawacek, Stefan Hummel, Charlène Brillard, Mustafa Kangül, Georg E Fantner

Journal title: Beilstein Journal of Nanotechnology

Journal number: 11

Journal publisher: Beilstein-Institut Zur Forderung der Chemischen Wissenschaften

Published year: 2020

Published pages: 1272-1279

DOI identifier: 10.3762/bjnano.11.111

ISSN: 2190-4286