Site-controlled formation of single Si nanocrystals in a buried SiO 2 matrix using ion beam mixing

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Authors: Xiaomo Xu, Thomas Prüfer, Daniel Wolf, Hans-Jürgen Engelmann, Lothar Bischoff, René Hübner, Karl-Heinz Heinig, Wolfhard Möller, Stefan Facsko, Johannes von Borany, Gregor Hlawacek

Journal title: Beilstein Journal of Nanotechnology

Journal number: 9

Journal publisher: Beilstein-Institut Zur Forderung der Chemischen Wissenschaften

Published year: 2018

Published pages: 2883-2892

DOI identifier: 10.3762/bjnano.9.267

ISSN: 2190-4286