Pillars fabrication by DSA lithography: material and process options

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Authors: Gabriel Reynaud, Ahmed Gharbi, Patricia Pimenta-Barros, Olivia Saouaf, Laurent Pain, Raluca Tiron, Christophe Navarro, Célia Nicolet, Ian Cayrefourcq, Michele Perego, Francesc Pérez-Murano, Esteve Amat, Marta Fernández-Regúlez

Journal title: Advances in Patterning Materials and Processes XXXV

Journal publisher: SPIE

Published year: 2018

Published pages: 25

DOI identifier: 10.1117/12.2297414

ISBN: 9781-510616653