Atomistic simulation of ion irradiation of semiconductor heterostructures

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Authors: C. Fridlund, J. Laakso, K. Nordlund, F. Djurabekova

Journal title: Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms

Journal number: 409

Journal publisher: Elsevier BV

Published year: 2017

Published pages: 14-18

DOI identifier: 10.1016/j.nimb.2017.04.034

ISSN: 0168-583X