Morphology modification of Si nanopillars under ion irradiation at elevated temperatures: plastic deformation and controlled thinning to 10 nm

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Authors: Xiaomo Xu, Karl-Heinz Heinig, Wolfhard Möller, Hans-Jürgen Engelmann, Nico Klingner, Ahmed Gharbi, Raluca Tiron, Johannes von Borany, Gregor Hlawacek

Journal title: Semiconductor Science and Technology

Journal number: 35/1

Journal publisher: Institute of Physics Publishing

Published year: 2020

Published pages: 015021

DOI identifier: 10.1088/1361-6641/ab57ba

ISSN: 0268-1242