Report on the first version of process simulator of ion implantation and mixing in Si/SiO2 nanostructures

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Report on the first version of process simulator of ion implantation and mixing in Si/SiO2 nanostructures
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Web resources: https://www.ec.europa.eu/research/participants/documents/downloadPublic?documentIds=080166e5b83428a6&appId=PPGMS
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