Assessment of IETS and DA-SDT investiga-tion of defects at the Si/SiO2 interface

Summary
Assessment of IETS and DA-SDT investiga-tion of defects at the Si/SiO2 interface
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Web resources: https://www.ec.europa.eu/research/participants/documents/downloadPublic?documentIds=080166e5bac54ca9&appId=PPGMS
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