Femtosecond Laser Assisted 3D Etching Using Inorganic-Organic Etchant

Summary

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Authors: A. Butkutė, G. Merkininkaitė, J. Stančikas, T. Baravykas, R. Vargalis, T. Tičkūnas, J. Bachmann, S. Šakirzanovas, V. Sirutkaitis, L. Jonušauskas

Journal title: Materials

Journal publisher: MDPI Open Access Publishing

Published year: 2022

Published pages: 2817

DOI identifier: 10.3390/ma15082817

ISSN: 1996-1944