Large-area thermoelectric high-aspect-ratio nanostructures by atomic layer deposition

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Authors: Mikko Ruoho, Taneli Juntunen, Ilkka Tittonen

Journal title: Nanotechnology

Journal number: 27/35

Journal publisher: Institute of Physics Publishing

Published year: 2016

Published pages: 355403

DOI identifier: 10.1088/0957-4484/27/35/355403

ISSN: 0957-4484