Thermal conductivity of amorphous Al 2 O 3 /TiO 2 nanolaminates deposited by atomic layer deposition

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Authors: Saima Ali, Taneli Juntunen, Sakari Sintonen, Oili M E Ylivaara, Riikka L Puurunen, Harri Lipsanen, Ilkka Tittonen, Simo-Pekka Hannula

Journal title: Nanotechnology

Journal number: 27/44

Journal publisher: Institute of Physics Publishing

Published year: 2016

Published pages: 445704

DOI identifier: 10.1088/0957-4484/27/44/445704

ISSN: 0957-4484