Advanced simulations on laser annealing: explosive crystallization and phonon transport corrections

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Authors: Alberto Sciuto, Ioannis Deretzis, Giuseppe Fisicaro, Salvatore F. Lombardo, Antonino La Magna, Maria Grazia Grimaldi, Karim Huet, Bobby Lespinasse, Armand Verstraete, Benoit Curvers, Igor Bejenari, Alexander Burenkov, Peter Pichler

Journal title: 2020 International Conference on Simulation of Semiconductor Processes and Devices (SISPAD)

Journal publisher: IEEE

Published year: 2020

Published pages: 71-74

DOI identifier: 10.23919/sispad49475.2020.9241660

ISBN: 978-4-86348-763-5